Silicon pressure sensor has some technical problems

Pressure sensors in automotive vehicles, barometers, medical equipment, wind control, air flow meter, respirators and ventilators, etc. silicon pressure Cooling Temperature Sensor are widely used. The temperature of the silicon Camshaft Position Sensor chip is very large, mainly affecting the zero and sensitivity drift generating root cause: In the production process, the composition of the four Wheatstone bridge resistance of the surface doping concentration and the diffusion resistance of the width can not be completely the same, so that the resistance of the four resistors are not exactly equal, the temperature coefficient not equal, resulting when the input pressure is 0, the bridge output is not 0, and the output changes with temperature drift, the zero temperature drift; thermal behavior of the semiconductor piezoresistive coefficient variation with temperature, causes the pressure sensitive drift with temperature. In addition, after the procedure and the glass chip static packaging, adhesives, silicone and cavity design will add temperature. In summary factors, packaged pressure sensor zero offset compensation includes calibration zero temperature drift compensation and sensitivity temperature compensation.